Semiconductor Chillers

semiconductorchillers-headerThe semiconductor production process requires highly precise and effective liquid cooling or air condition cooling. Whaley provides thermal temperature management for many chip manufacturing technologies, specializing in providing clients withmodular chillers, packaged recirculating chillers, split chiller systems, closed loop chillers with stainless steel, titanium, and cupre nickel heat exchangers. WPI has been serving the semiconductor / chip manufacturing industry since 1993. Contact an experienced semiconductor cooling engineer today.



Here are just a few Semiconductor chiller applications:
Burn-in equipment wafer chuck cooling/heating
ATE (automatic test equipment) test head cooling
Laser trimming system cooling
Metrology tool cooling
Process chamber cooling
UV cure system cooling

SA Series
Packaged Chillers
(integrated pump tank)
1.5Ton – 20Ton
Single / Dual Circuits
Single / Dual Pumps
SAE Series
Modular Chillers
(pump & tank on
separate skid)
1.5Ton – 200Ton
Single / Dual Circuits
SAR Series
Split Chillers
(Outdoor Condensing Unit)
(pump, tank, evaporator on
indoor skid)
1.5Ton – 200Ton
Single / Dual Circuits